Using PECVD equipment, the research team succeeded in producing two types of 4-inch wafer-scale heterostructures. The first type, a heterostructure of WS 2) and graphene, was fabricated by ...

and a fill factor of 75.8. The research team built the cell on a 4-inch wafer scale by applying a microgrid electrode with a uniform square pattern array with a width of 3–4 µm and a spacing of ...

An image of the 4.7-μm 4-inch wafer with arrow indicating the TSRR structure. Underneath a white light, the letters “SJTU SYSU” printed on a piece of paper below the thin silicon wafer are ...